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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 101-110 of 141 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2001-07
Extraction of Exposure Parameters for 193-nm Chemically Amplified Resist and its Application to Simulation
오혜근
2001-07
Extraction of Exposure Parameters for 193-nm Chemically Amplified Resist and Its Application to Simulation
오혜근
2001-07
Thickness Reduction Effect in a Chemically amplified Resist Simulator
오혜근
2001-07
Thickness Reduction Effect in Chemically Amplified Resist Simulator
오혜근
2002-03
CD Prediction by Threshold Energy Resist Model
오혜근
2001-12
Real-Time Spectroscopic Ellipsometric Studies of photo-Assisted Chemical Processes
오혜근
2001-02
193nm용 화학 증폭형 감광제의 노광 후 열처리 과정중 두께 변화에 관한 연구
오혜근
2001-02
193nm 화학 증폭형 감광제 시뮬레이션을 위한 노광후 지연 효과에 대한 연구
오혜근
2003-12
Muller matrix ellipsometry 제작 및 응용
오혜근
2003-12
Ellipsometry 에서의 calibration 및 입사면 고정형 ellipsometer
오혜근
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-Subject
17
Lithography
9
lithography
8
ellipsometry
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Simulation
6
Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
5
Aerial image
5
EUV lithography
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EUV mask
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2000
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