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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-9 of 9 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2001-12
Parameter extraction for 193 nm chemically amplified resist from refractive index change
오혜근
2001-03
Post Exposure Delay Consideration in 193 nm Chemically Amplified Resist
오혜근
2001-07
Extraction of Exposure Parameters for 193-nm Chemically Amplified Resist and its Application to Simulation
오혜근
2001-07
Extraction of Exposure Parameters for 193-nm Chemically Amplified Resist and Its Application to Simulation
오혜근
2001-07
Thickness Reduction Effect in a Chemically amplified Resist Simulator
오혜근
2001-07
Thickness Reduction Effect in Chemically Amplified Resist Simulator
오혜근
2001-12
Real-Time Spectroscopic Ellipsometric Studies of photo-Assisted Chemical Processes
오혜근
2001-02
193nm용 화학 증폭형 감광제의 노광 후 열처리 과정중 두께 변화에 관한 연구
오혜근
2001-02
193nm 화학 증폭형 감광제 시뮬레이션을 위한 노광후 지연 효과에 대한 연구
오혜근
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ellipsometry
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Lasers
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Optical properties
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photo-assisted
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polydiacetylene
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