Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-5 of 5 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2005-04
Reduction of the Absorber Shadow Effect by Changing the Absorber Side Wall Angle in Extreme Ultraviolet Lithography
오혜근
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2005-03
Line width variation with absorber thickness in extreme ultraviolet lithography
오혜근
2008-02
22 nm node contact hole formation in extreme ultra-violet lithography
오혜근
2004-11
Aerial image characterization for defects in an extreme-ultraviolet mask
오혜근
previous
1
next
Discover
-Author
5
오혜근
-Subject
3
EUV mask
2
Aerial image
2
Multilayer defect
1
22 nm node
1
aerial image
1
Aerialimage
1
Contact hole
1
FDTD (finite-difference time-domain)
1
Mask absorber
1
Mask thickness
next >
-Date issued
1
2008
2
2005
2
2004
BROWSE
Communities & Collections
Titles
Authors