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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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2009-08
Impact of the Parameters for a Chemically-amplified Resist on the Line-edge-roughness by Using a Molecular-scale Lithography Simulation
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2009-04
Impact of Polarization Inside a Resist for ArF Immersion Lithography
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Taguchi method
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2009
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