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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-6 of 6 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2009-08
Impact of the Parameters for a Chemically-amplified Resist on the Line-edge-roughness by Using a Molecular-scale Lithography Simulation
정영대
2010-03
Mechanism of Embedded Micro/Nano Channel Formation for a Negative-tone Photoresist by Moving Mask Lithography
정영대
2009-08
Modeling of the Cross-linking and the Diffusion Processes in a Negative Chemically Amplified Resist
정영대
2010-12
Simulation Study of Sub-10 nm Pattern Formation Using Diblock Polymer Directed Self-assembly
정영대
2010-05
A study of virtual lithography process for polymer directed self-assembly
정영대
2009-04
Impact of Polarization Inside a Resist for ArF Immersion Lithography
정영대
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-Subject
5
Lithography
2
Self-assembly
2
Self-assembly process
1
Block copolymer
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CAR
1
Chemically amplified resist
1
Chemically-amplified resist
1
Embedded fluidic channels
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Finite-difference time domain
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Immersion lithography
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-Date issued
3
2010
3
2009
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