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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 31-40 of 44 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2008-04
Application of ellipsometry in immersion lithography
안일신
2008-08
Ellipsometry for Pellicle-Covered Surface
안일신
2008-06
Anisotropic resist reflow process simulation for 22 nm elongated contact holes
안일신
2006-06
Mask Haze Measurement by Spectroscopic Ellipsometry
안일신
2006-06
Patterning of Thin Copper Films under UV exposure in Chlorine-Based Liquids
안일신
2004-12
Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films
안일신
2004-07
Photoinduced patterning of gold thin film
안일신
2004-08
Morphological development and etching of gold thin film under UV-exposure in Chlorine-based liquids
안일신
2004-05
Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle
안일신
2004-05
Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer
안일신
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ellipsometry
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Ellipsometry
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lithography
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Navier-Stokes equation
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32 nm line and space half-pitch
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ALIGNMENT
2
bias
2
BIPLATE COMPENSATOR
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chlorine
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Data reduction
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