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Morphological development and etching of gold thin film under UV-exposure in Chlorine-based liquids

Title
Morphological development and etching of gold thin film under UV-exposure in Chlorine-based liquids
Author
안일신
Keywords
TIME SPECTROSCOPIC ELLIPSOMETRY; SELF-ASSEMBLED MONOLAYERS; INTERFACE; AU(111); MICROSCOPY; SURFACE; STRESS
Issue Date
2004-08
Publisher
CHEMICAL SOC JAPAN
Citation
CHEMISTRY LETTERS, v. 33, No. 10, Page. 1232-1233
Abstract
Gold thin film is found to be soluble in chlorine-containing liquid such as 1,2-dichloroethane, NaCl, or HCl solution under illumination, especially UV shorter than 310 nm. We attribute this to the formation of gold chloride and its desorption from the surface. Atomic force microscopy study shows that the grain-like surface morphology evolves during the etch process.
URI
https://www.journal.csj.jp/doi/pdf/10.1246/cl.2004.1232https://repository.hanyang.ac.kr/handle/20.500.11754/151631
ISSN
03667022
DOI
10.1246/cl.2004.1232
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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