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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 81-89 of 89 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2009-06
Investigation of Resolution Enhancement by Using Interferometric Immersion Lithography with a Lloyd Mirror
오혜근
2008-01
32 nm 1:1 Line and Space Patterning by Resist Reflow Process
오혜근
2007-04
The process latitude dependency on local photomask haze defect in 70 nm binary intensity mask
오혜근
2007-04
Resist Reflow Modeling Including Surface Tension and Bulk Effect
오혜근
2009-11
Heat conduction from hot plate to photoresist on top of wafer including heat loss to the environment
오혜근
2004-08
Photoinduced patterning of gold thin film
오혜근
2004-11
Angular dependency of off-axis illumination on 100 nm width pattern printability for extreme ultraviolet lithography: Ru/Mo/Si reflector system
오혜근
2004-06
The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method
오혜근
2004-06
Effect of Extreme Ultraviolet Light Scattering from the Rough Absorber and Buffer Side Wall
오혜근
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Lithography
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lithography
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Lithography simulation
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Resist reflow process
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EUV lithography
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EUV mask
5
EUVL
5
Navier-Stokes equation
4
Chemically amplified resist
4
Contact hole
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