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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 11-20 of 89 (Search time: 0.003 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-02
Evaluation of partial coherent imaging using the transfer function in immersion lithography
오혜근
2006-02
Numerical modeling of absorber characteristics for EUVL
오혜근
2006-02
The effect of transmission reduction by reticle haze formation
오혜근
2006-01
Optical lithography simulator for the whole resist process
오혜근
2006-02
Optimization of chromeless phase mask by comparing scattering bars with zebra patterns
오혜근
2006-02
Mask error enhancement factor variation with pattern density for 65 nm and 90 nm line widths
오혜근
2006-02
Improvement of column spacer uniformity in a TFT LCD panel
오혜근
2005-04
Reduction of the Absorber Shadow Effect by Changing the Absorber Side Wall Angle in Extreme Ultraviolet Lithography
오혜근
2004-05
Simple 157-nm interference illumination system for pattern formation
오혜근
2004-05
Exposure simulation of electron beam microcolumn lithography
오혜근
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-Subject
12
Lithography
8
lithography
6
Lithography simulation
6
Resist reflow process
5
EUV lithography
5
EUV mask
5
EUVL
5
Navier-Stokes equation
4
Chemically amplified resist
4
Contact hole
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-Date issued
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2009
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2004
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