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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 71-80 of 84 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2003-02
A Practical Method of Extracting the Photoresist Exposure Parameters by Using a Dose-to-Clear Swing Curve
안일신
2003-02
Lithography Process Optimization Simulator for an Illumination System
안일신
2003-02
Resist Pattern Collapse Modeling for Smaller Features
안일신
2004-05
Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle
안일신
2004-05
Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer
안일신
2004-06
The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method
안일신
2004-06
Effect of Extreme Ultraviolet Light Scattering from the Rough Absorber and Buffer Side Wall
안일신
2004-05
Simultaneous determination of bulk isotropic and surface-induced anisotropic complex dielectric functions of semiconductors from high speed Mueller matrix ellipsometry
안일신
2004-05
Analysis of the optical properties and structure of sculptured thin films from spectroscopic Mueller matrix ellipsometry
안일신
2003-05
Multichannel Mueller matrix ellipsometry for simultaneous real-time measurement of bulk isotropic and surface anisotropic complex dielectric functions of semiconductors
안일신
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ellipsometry
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Ellipsometry
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Lithography
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calibration
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lithography
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Navier-Stokes equation
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32 nm line and space half-pitch
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ALIGNMENT
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bias
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BIPLATE COMPENSATOR
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2020 - 2023
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