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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
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Results 1-10 of 17 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2020-02
Hybrid DHF and N-2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
김태곤
2020-06
The adsorption and removal of corrosion inhibitors during metal CMP
김태곤
2022-01
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
김태곤
2021-03
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
김태곤
2021-04
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
김태곤
2022-05
Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning
김태곤
2022-02
Study on PVA Brush Loading and Conditioning during Shallow Trench Isolation Post-CMP Cleaning Process
김태곤
2020-12
Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process
김태곤
2020-10
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
김태곤
2020-07
Characterization of Different Cobalt Surfaces and Interactions with Benzotriazole for CMP Application
김태곤
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Brush scrubbing
3
Post CMP cleaning
1
Acoustic bubble cavitation
1
antimony selenide overlayers
1
APM
1
BibTeX
1
Brush skin layer
1
Cadmium telluride
1
Ce-O-Si bonding
1
Ce-O-Si bonding, Colloidal Ceria
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-Date issued
3
2023
3
2022
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2021
5
2020
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