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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-7 of 7 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2004-02
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
박진구
2005-06
Fabrication of metal line on plastic substrate by hot embossing and CMP process
박진구
2004-11
Slurry에 첨가되는 pH 적정제가 Cu CMP에 미치는 영향 분석
박진구
2004-07
CMP 공정중 전기화학적 방법과 마찰력을 이용하여 Cu Wafer와 Disc의 특성 비교
박진구
2005-11
Cu Oxide와 Silicon Tip 사이의 나노트라이볼러지 작용
박진구
2008-07
The effect of hydrogen peroxide on frictional and thermal behaviors in a citric acid-based copper chemical mechanical planarization slurry
박진구
2008-01
Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing
박진구
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Removal rate
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AFM
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Benzotriazole (BTA)
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chemical mechanical planarization
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Chemical-Mechanical Planarization...
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citric acid
1
Computational Fluid Dynamics (CFD)
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Copper
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copper
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Cu disc
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-Date issued
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2008
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2004
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