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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 21-30 of 131 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2015-05
Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation
박진구
2015-03
Large-Scale Plasma Patterning of Transparent Graphene Electrode on Flexible Substrates
박진구
2015-05
Multi-stack extreme-ultraviolet pellicle with out-of-band reduction
박진구
2015-00
Fabrication of bumping mask for flip-chip process on stainless steel using through mask electrochemical micro machining(TMEMM)
박진구
2015-00
Prevention of metal contamination in sub 50 nm SC1 cleaning process
박진구
2020-12
Adhesive resin composites with ceramic nanoparticles for enhanced light extraction efficiency of sandwiched LED device structure
박진구
2018-10
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
박진구
2020-02
Hybrid DHF and N-2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
박진구
2020-03
Nanocatalyst-induced hydroxyl radical ((OH)-O-center dot) slurry for tungsten CMP for next-generation semiconductor processing
박진구
2019-00
The adhesion and removal mechanism of Ceria particles for STI post-CMP cleaning process
박진구
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CMP
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Fixed abrasive pad
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Megasonic cleaning
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Particle removal
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Pellicle
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Ceria
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Cleaning
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Diamond
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Lapping
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Pad debris
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