Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 81-88 of 88 (Search time: 0.006 seconds).
Item hits:
Issue Date
Title
Author(s)
2008-12
Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions
박진구
2003-02
Laser Shock Removal of Micro and Nanoscale Particles
박진구
2003-02
Adhesion and removal of silica and alumina slurry particles during Cu CMP process
박진구
2004-06
The Effects of Mechanical Properties of Polishing Pads on Oxide CMP(Chemical Mechanical Planarization)
박진구
2004-06
레이저 충격파 클리닝 공정에 있어 자외선의 영향
박진구
2004-06
Reaction of Ozone and H2O2 in NH4OH Solutions and Their Reaction with Silicon Wafers
박진구
2008-04
Effect of sodium periodate in alumina-based slurry on Ru CMP for metal-insulator-metal capacitor
박진구
2008-01
Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing
박진구
previous
1
...
6
7
8
9
next
Discover
-Subject
7
CMP
5
Cu CMP
3
adhesion force
3
AFM/LFM
3
Anti-stiction layer
3
BTA
3
Chemical mechanical planarization...
3
Etch rate
3
Hot Embossing
3
Nanoimprinting
next >
-Date issued
8
2009
11
2008
11
2007
9
2006
19
2005
10
2004
6
2003
BROWSE
Communities & Collections
Titles
Authors