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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 41-50 of 264 (Search time: 0.004 seconds).
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Issue Date
Title
Author(s)
2009-11
A novel approach for scratch detection and study on dependency of scratches during oxide CMP
박진구
2003-06
Si Wafer Surface Cleaning Using Laser-Induced Shock Wave: A New Dry Cleaning Methodology
박진구
2002-05
다이아몬드 CVD 증착에 의한 세라믹 CMP Conditioner의 Conditioning 거동
박진구
2021-12
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
박진구
2002-10
Passivation and Etching of Wafer Surfaces in HF-H2O2-IPA Solutions
박진구
2001-03
Physical and Chemical Characterization of Reused Oxide Chemical Mechanical Planarization Slurry
박진구
2002-03
Effect of Organic Acids in Copper Chemical Mechanical Planarization Slurry on Slurry Stability and Particle Contamination on Copper Surfaces
박진구
2002-03
Next Generation Scratch and Corrosion Free Conditioner for Chemical Mechanical Planarization
박진구
2001-07
Nanotribological Characterization of Fluorocarbon Thin Film by Plasma Enhanced CVD
박진구
2002-01
Si Wafer Surface Cleaning Using Laser-induced Shock Wave : A New Dry Cleaing Methodology
박진구
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CMP
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Particle removal
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Post CMP cleaning
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Cu CMP
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Megasonic cleaning
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Chemical mechanical planarization...
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Removal rate
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AFM
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Benzotriazole
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2020 - 2023
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