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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-10 of 23 (Search time: 0.005 seconds).
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Issue Date
Title
Author(s)
2021-04
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
박진구
2021-03
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
박진구
2021-02
Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
박진구
2021-02
Effect of Dissolved Oxygen on Removal of Benzotriazole from Co during a Post-Co CMP Cleaning
박진구
2021-02
Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process
박진구
2021-02
Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
박진구
2021-02
The Effect of Thermal Aging on Nano-Particle Removal
박진구
2021-01
Tungsten passivation layer (WO3) formation mechanisms during chemical mechanical planarization in the presence of oxidizers
박진구
2020-02
Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
박진구
2021-12
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
박진구
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Brush scrubbing
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Post CMP cleaning
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APM
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Chemical cleaning
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DHF
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DIW spray
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DRAM pattern
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Hybrid cleaning
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Megasonic cleaning
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2022
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2021
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2020
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