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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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2017-06
Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
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2017-09
Silicon oxide film deposited at room temperatures using high-working pressure plasma-enhanced chemical vapor deposition: Effect of O-2 flow rate
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Water permeation property
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