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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
ARCHITECTURE(건축학부)
BIONANO ENGINEERING(생명나노공학과)
CENTER FOR INNOVATION OF ENGINEERING EDUCATION(공학교육혁신센터)
CIVIL AND ENVIRONMENTAL ENGINEERING(건설환경공학과)
COMPUTER SCIENCE AND ENGINEERING(컴퓨터공학과)
ELECTRICAL ENGINEERING(전자공학부)
ELECTRONIC SYSTEMS ENGINEERING(전자시스템공학과)
INDUSTRIAL AND MANAGEMENT ENGINEERING(산업경영공학과)
INTEGRATIVE ENGINEERING(융합공학과)
MATERIALS ENGINEERING(재료공학과)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
MECHANICAL ENGINEERING(기계공학과)
MILITARY INFORMATION ENGINEERING(국방정보공학과)
ROBOT ENGINEERING(로봇공학과)
TRANSPORTATION AND LOGISTICS ENGINEERING(교통·물류공학과)
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Results 11-18 of 18 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2002-11
Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filterations
박진구
2002-11
Point of use regeneration of oxide chemical mechanical planarization slurry by filtrations
박진구
2000-03
Effect of chemicals and slurry particles on chemical mechanical polishing of polyimide
박진구
2005-11
Cu Oxide와 Silicon Tip 사이의 나노트라이볼러지 작용
박진구
2008-07
The effect of hydrogen peroxide on frictional and thermal behaviors in a citric acid-based copper chemical mechanical planarization slurry
박진구
2002-08
화학기계적연마 공정에서 미소 스크래치 저발생화를 위한 가공기술 연구
안유민
2003-11
Oxide CMP 과정에 대한 수치 유동 해석
이도형
2008-01
Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing
박진구
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oxide slurry
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TEOS removal rate
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Pad
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slurry
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alumina particles
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ceria particles
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CFD
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conductivity
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Copper
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defect density
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