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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-4 of 4 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2013-05
Control of plasma density distribution via wireless power transfer in an inductively coupled plasma
정진욱
2015-04
Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas
정진욱
2015-12
A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma
정진욱
2020-07
Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma
정진욱
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13.56 MHZ
1
ARGON
1
DENSITY
1
DISTRIBUTIONS
1
EFFICIENCY
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ELECTRON-ENERGY-DISTRIBUTION
1
ELECTRONEGATIVITY
1
ENERGY
1
FREQUENCY
1
HEATING-MODE TRANSITION
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2020
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2013
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