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COLLEGE OF ENGINEERING[S](공과대학)
ENERGY ENGINEERING(에너지공학과)
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Results 1-3 of 3 (Search time: 0.002 seconds).
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2017-09
Increase in Ce3+ Concentration of Ceria Nanoparticles for High Removal Rate of SiO2 in Chemical Mechanical Planarization
백운규
2017-05
Highly Dispersed Fe3+-Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization
백운규
2017-11
Communication — Reduction of friction force between ceria and SiO˂inf˃2˂/inf˃for low dishing in STI CMP
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