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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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2017-04
ZrO2 film prepared by atomic layer deposition using less viscous cocktail CpZr[N(CH3)2]3 /C7H8 precursor and ozone
박인성
2017-02
Oxidant effect of La(NO3)3∙6H2O solution on the crystalline characteristics of nanocrystalline ZrO2 films grown by atomic layer deposition
박인성
2018-07
Leakage current suppression in spatially controlled Si-doped ZrO2 for capacitors using atomic layer deposition
전형탁
2016-01
Characteristics of Al2O3/ZrO2 laminated films deposited by ozone-based atomic layer deposition for organic device encapsulation
전형탁
2016-11
The effect of ozone concentration during atomic layer deposition on the properties of ZrO2 films for capacitor applications
전형탁
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Agglomeration
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Al2O3
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Cocktail precursor
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CpZr(NMe2)(3)
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Crystalline structure
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Cycloheptatriene
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Dynamic random access memory
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High-kappa dielectrics
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