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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 21-30 of 88 (Search time: 0.004 seconds).
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Issue Date
Title
Author(s)
2011-11
Carbon contamination of EUV mask and its effect on CD performance
안진호
2012-01
Impact of ozone concentration on atomic layer deposited HfO2 on GaAs
안진호
2013-07
Very Thin Extreme Ultraviolet Mask Absorber Material for Extremely Fine Pitch Patterning
안진호
2011-12
Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting
안진호
2012-11
Evaluation of lithographic performance of extreme ultra violet mask using coherent scattering microscope
안진호
2012-11
Removing graphite flakes for preparing mechanically exfoliated graphene sample
안진호
2016-06
고 개구수 극자외선 노광 기술용 위상 변위 흡수체 구조의 설계
안진호
2013-03
Enhanced light extraction from Y2O3:Eu3+ phosphor films via vacuum nano-imprint lithography using spin-on dielectric materials
안진호
2013-04
Raman spectroscopic image analysis on micropatterned graphene
안진호
2013-08
Stochastic Patterning Simulation Using Attenuated Phase-Shift Mask for Extreme Ultraviolet Lithography
안진호
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EUVL
4
Atomic layer deposition
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EUV
4
EUV lithography
4
EUV pellicle
4
FILMS
4
Pellicle
3
ANGLE
3
Core-shell
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EUV Lithography
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