Enhanced light extraction from Y2O3:Eu3+ phosphor films via vacuum nano-imprint lithography using spin-on dielectric materials
- Title
- Enhanced light extraction from Y2O3:Eu3+ phosphor films via vacuum nano-imprint lithography using spin-on dielectric materials
- Author
- 안진호
- Keywords
- Spin-on dielectric; Nano-imprint lithography; Light extraction efficiency; Y2O3:Eu3+ thin-film phosphor
- Issue Date
- 2013-03
- Publisher
- ELSEVIER SCIENCE SA, PO BOX 564, 1001 LAUSANNE, SWITZERLANDELSEVIER SCIENCE SA, PO BOX 564, 1001 LAUSANNE, SWITZERLAND
- Citation
- THIN SOLID FILMS, 권: 547, 페이지: 222-224
- Abstract
- This paper reports a simple process to enhance the extraction efficiency of photoluminescence from Eu-doped yttrium oxide (Y2O3:Eu3+) thin-film phosphor. The two-dimensional (2D) SiO2 photonic crystal layer was fabricated by vacuum nano-imprint method using a conventional spin-on dielectric solution as a nano-imprint resin and a 2D patterned Si stamp. The applied pressure and temperature of the patterning and annealing process facilitates the conversion of the spin-on dielectric solution into a SiO2 hemisphere structure resulting in high definition transfer of the 2D reverse pattern of the Si mold. The light extraction efficiency of the Y2O3:Eu3+ thin-film phosphor assisted by 2D SiO2 photonic crystal layer was approximately 1.72 times higher than that of the conventional Y2O3:Eu3+ thin-film phosphor. (C) 2013 Elsevier B. V. All rights reserved.
- URI
- https://www.sciencedirect.com/science/article/pii/S0040609013003490?via%3Dihubhttp://hdl.handle.net/20.500.11754/44160
- ISSN
- 0040-6090
- DOI
- 10.1016/j.tsf.2013.02.079
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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