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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-4 of 4 (Search time: 0.001 seconds).
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Issue Date
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2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
안진호
2016-07
Impact of EUV Pellicle Transmittance on Imaging Performance Analyzed by Coherent Scattering Microscopy
안진호
2015-03
Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography
안진호
2015-04
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
안진호
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EUV
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EUVL
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Coherent Scattering Microscopy
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Extreme UV
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Imaging Performance
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Lithography
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