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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-10 of 17 (Search time: 0.002 seconds).
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2016-06
고 개구수 극자외선 노광 기술용 위상 변위 흡수체 구조의 설계
안진호
2016-09
극자외선 리소그라피에서의Sub-resolution assist feature를 이용한 근접효과보정
안진호
2016-09
EUV 펠리클 투과도에 따른 이미지 전사 특성 분석
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2016-09
Fabrication of Fe3O4-ZnO core-shell nanoparticles by rotational atomic layer deposition and their multi-functional properties
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2016-09
Phase Shift Mask to Compensate for Mask 3D Effect in High-Numerical-Aperture Extreme Ultraviolet Lithography
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2016-09
Sub-Resolution Assist Feature in Attenuated Phase-Shift Mask for Extreme Ultraviolet Lithography
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2016-07
Coherent scattering microscopy as an effective inspection tool for analyzing performance of phase shift mask
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2016-07
Improved Margin of Absorber Pattern Sidewall Angle Using Phase Shifting Extreme Ultraviolet Mask
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2016-07
Impact of EUV Pellicle Transmittance on Imaging Performance Analyzed by Coherent Scattering Microscopy
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2016-07
GeOx interfacial layer scavenging remotely induced by metal electrode in metal/HfO2/GeOx/Ge capacitors
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EUV Lithography
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EUVL
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optical properties
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Phase Shift Mask
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ceramics
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coherent scattering microscopy (CSM)
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computer simulation
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deposition
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EUV lithography
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