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Browsing "COLLEGE OF ENGINEERING[S](공과대학)" byAuthor박종완
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Showing results 36 to 40 of 40
Issue Date
Title
Author(s)
2014-01
Self-forming Al oxide barrier for nanoscale Cu interconnects created by hybrid atomic layer deposition of Cu-Al alloy
박종완
2013-11
Self-forming barrier characteristics of Cu-V and Cu-Mn films for Cu interconnects
박종완
2014-07
Self-forming Mn-based diffusion barriers on low-k substrates
박종완
2014-11
Self-forming VOx layer as Cu diffusion barrier for low-k dielectrics
박종완
2015-02
Spectroscopic characteristics of topaz: The impact of electron beam irradiation and heat treatment
박종완
1
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