Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진성 | - |
dc.date.accessioned | 2018-03-16T04:30:30Z | - |
dc.date.available | 2018-03-16T04:30:30Z | - |
dc.date.issued | 2014-02 | - |
dc.identifier.citation | Applied Surface Science, 15 May 2014, 301, 358-362 | en_US |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | http://www.sciencedirect.com/science/article/pii/S0169433214003845?via%3Dihub | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/47796 | - |
dc.description.abstract | Mist chemical vapor deposition (mist-CVD)-processed, lithium (Li)-doped ZnO thin film transistors (TFTs) are investigated. Li doping significantly increases the field-effect mobility in TFTs up to similar to 100 times greater than that of undoped ZnO. The addition of Li into mist-CVD-grown ZnO semiconductors leads to improved film quality, which results from the enhanced crystallinity and reduced defect states, including oxygen vacancies. Our results suggest that Li doping of ZnO-based oxide semiconductors could serve as an effective strategy for high-performance, mist-CVD-processed oxide TFTs with low-cost and low-temperature fabrication. (C) 2014 Elsevier B.V. All rights reserved. | en_US |
dc.language.iso | en | en_US |
dc.publisher | Elsevier Science B.V., Amsterdam. | en_US |
dc.subject | Chemical vapor deposition | en_US |
dc.subject | Oxide semiconductor | en_US |
dc.subject | Thin film transistor | en_US |
dc.subject | ELECTRICAL-PROPERTIES | en_US |
dc.subject | ZINC ACETATE | en_US |
dc.subject | GROWTH | en_US |
dc.subject | PERFORMANCE | en_US |
dc.title | Enhanced mobility of Li-doped ZnO thin film transistors fabricated by mist chemical vapor deposition | en_US |
dc.type | Article | en_US |
dc.relation.volume | 301 | - |
dc.identifier.doi | 10.1016/j.apsusc.2014.02.080 | - |
dc.relation.page | 358-362 | - |
dc.relation.journal | APPLIED SURFACE SCIENCE | - |
dc.contributor.googleauthor | Jeon, Hye-ji | - |
dc.contributor.googleauthor | Lee, Seul-Gi | - |
dc.contributor.googleauthor | Kim, H. | - |
dc.contributor.googleauthor | Park, Jin-Seong | - |
dc.relation.code | 2014025359 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | jsparklime | - |
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