Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김영범 | - |
dc.date.accessioned | 2018-03-16T00:29:05Z | - |
dc.date.available | 2018-03-16T00:29:05Z | - |
dc.date.issued | 2012-01 | - |
dc.identifier.citation | Journal of Vacuum Science & Technology. A, 2012, 30(1), P.01A161 | en_US |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.issn | 0022-5355 | - |
dc.identifier.uri | http://avs.scitation.org/doi/abs/10.1116/1.3670750 | - |
dc.description.abstract | The authors have investigated the change of chemical composition, crystallinity, and ionic conductivity in fluorine contaminated yttrium-doped barium zirconate (BYZ) fabricated by atomic layer deposition (ALD). It has been identified that fluorine contamination can significantly affect the conductivity of the ALD BYZ. The authors have also successfully established the relationship between process temperature and contamination and the source of fluorine contamination, which was the perfluoroelastomer O-ring used for vacuum sealing. The total removal of fluorine contamination was achieved by using all-metal sealed chamber instead of O-ring seals. (C) 2012 American Vacuum Society. [DOI: 10.1116/1.3670750] | en_US |
dc.language.iso | en | en_US |
dc.publisher | American Vacuum Society | en_US |
dc.subject | PEROVSKITE-TYPE OXIDES | en_US |
dc.subject | THIN-FILMS | en_US |
dc.subject | PROTONIC CONDUCTORS | en_US |
dc.subject | HIGH-TEMPERATURES | en_US |
dc.subject | CONDUCTIVITY | en_US |
dc.subject | PRECURSORS | en_US |
dc.subject | TRANSPORT | en_US |
dc.subject | STABILITY | en_US |
dc.subject | BACEO3 | en_US |
dc.subject | CERATE | en_US |
dc.title | Fluorine contamination in yttrium-doped barium zirconate film deposited by atomic layer deposition | en_US |
dc.type | Article | en_US |
dc.relation.no | 1 | - |
dc.relation.volume | 30 | - |
dc.identifier.doi | 10.1116/1.3670750 | - |
dc.relation.page | 1-1 | - |
dc.relation.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.contributor.googleauthor | Kim, Young Beom | - |
dc.contributor.googleauthor | Park, Joong Sun | - |
dc.contributor.googleauthor | An, Jihwan | - |
dc.contributor.googleauthor | Prinz, Fritz B. | - |
dc.contributor.googleauthor | Shim Joon Hyung | - |
dc.contributor.googleauthor | Gur, Turgut M | - |
dc.relation.code | 2012214140 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | ybkim | - |
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