Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-03-10T07:00:39Z | - |
dc.date.available | 2018-03-10T07:00:39Z | - |
dc.date.issued | 2013-05 | - |
dc.identifier.citation | Review of Scientific Instruments, MAY 2013, 84(5) | en_US |
dc.identifier.issn | 0034-6748 | - |
dc.identifier.uri | http://aip.scitation.org/doi/abs/10.1063/1.4802673 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/44783 | - |
dc.description.abstract | A real-time measurement method for two-dimensional (2D) spatial distribution of the electron temperature and plasma density was developed. The method is based on the floating harmonic method and the real time measurement is achieved with little plasma perturbation. 2D arrays of the sensors on a 300 mm diameter wafer-shaped printed circuit board with a high speed multiplexer circuit were used. Experiments were performed in an inductive discharge under various external conditions, such as powers, gas pressures, and different gas mixing ratios. The results are consistent with theoretical prediction. Our method can measure the 2D spatial distribution of plasma parameters on a wafer-level in real-time. This method can be applied to plasma diagnostics to improve the plasma uniformity of plasma reactors for plasma processing. (C) 2013 AIP Publishing LLC. | en_US |
dc.description.sponsorship | This work was supported by the Science Research Center Program (2011-0000845), the Converging Research Center Program (2012K001238), The Ministry of Knowledge Economy (MKE, 2010T100100266), the National Research Foundation (2010-0020061), and the Basic Science Research Program (2011-0003122) of Research Foundation of Korea (NRF) grant funded by the Korea government (MEST). | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | Plasma diagnostics | en_US |
dc.subject | Plasma density | en_US |
dc.subject | Plasma temperature | en_US |
dc.subject | Plasma materials processing | en_US |
dc.subject | Plasma pressure | en_US |
dc.title | Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas | en_US |
dc.type | Article | en_US |
dc.relation.volume | 84 | - |
dc.identifier.doi | 10.1063/1.4802673 | - |
dc.relation.page | 1-2 | - |
dc.relation.journal | REVIEW OF SCIENTIFIC INSTRUMENTS | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Kim, Young-Cheol | - |
dc.contributor.googleauthor | Jang, Sung-Ho | - |
dc.contributor.googleauthor | Oh, Se-Jin | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2013011921 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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