Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers
- Title
- Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers
- Author
- 박관규
- Keywords
- CO2 detection; CMUT; Resonant chemical sensor; CO2 polymers
- Issue Date
- 2012-11
- Publisher
- ELSEVIER SCIENCE SA
- Citation
- SENSORS AND ACTUATORS B-CHEMICAL, v. 174, Page. 87-93
- Abstract
- Sensing of carbon dioxide (CO2) using inexpensive, miniaturized, and highly sensitive sensors is of great interest for environmental and consumer applications. In this paper, we present four functionalization layers that are suitable for resonant sensors based on mass-loading for CO2 detection. We compare the volume sensitivities of these layers to CO2 and relative humidity (RH) by using a highly sensitive 50-MHz capacitive micromachined ultrasonic transducer (CMUT) as a resonant sensor. Among the four functionalization layers, the layer based on a guanidine polymer exhibits the highest volume sensitivity to CO2 of 1.0 ppm/Hz in N-2 and 3.8 ppm/Hz in air (similar to 45%RH). Furthermore, we report on other important characteristics of the guanidine polymer for sensing applications, including polymer saturation, regeneration, and repeatability. (C) 2012 Elsevier B.V. All rights reserved.
- URI
- http://hdl.handle.net/20.500.11754/38261https://www.sciencedirect.com/science/article/pii/S0925400512008398?via%3Dihub
- ISSN
- 0925-4005
- DOI
- 10.1016/j.snb.2012.08.025
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML