Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2018-02-19T06:29:52Z | - |
dc.date.available | 2018-02-19T06:29:52Z | - |
dc.date.issued | 2011-10 | - |
dc.identifier.citation | ECS Transactions, Semiconductor Cleaning Science and Technology 12, SCST 12. ECS Transactions 2011, 41(5),221-227 | en_US |
dc.identifier.issn | 1938-5862 | - |
dc.identifier.issn | 1938-6737 | - |
dc.identifier.uri | http://ecst.ecsdl.org/content/41/5/221 | - |
dc.description.abstract | The effects of pumping method on wafer cleaning were investigated. Two types of pump such as diaphragms and centrifugal were used for circulation and supply of DI water for wafer cleaning in both wet bath and single wafer tool. The cleaning studies show that the pumping methods have a great influence on cleaning performance. The experimental investigations reveal that the number of added particles on the wafer during wafer cleaning is much lesser in MLC pump (non-pulsation flow) than the both diaphragm pumps (pulsation flow). | en_US |
dc.description.sponsorship | This work was supported by Levitronix LLC. We would like to thank Akrion for a single wafer processor (GF) and Levitronix for a magnetic levitation circulation pump (BPS-600). | en_US |
dc.language.iso | en | en_US |
dc.publisher | Pennington, N.J.; Electrochemical Society | en_US |
dc.subject | Diaphragm pumps | en_US |
dc.subject | Experimental investigations | en_US |
dc.subject | On-wafer | en_US |
dc.subject | Particle contamination | en_US |
dc.subject | Pump pulsations | en_US |
dc.subject | Pumping methods | en_US |
dc.subject | Single wafer | en_US |
dc.subject | Wafer cleaning | en_US |
dc.subject | Wet cleaning | en_US |
dc.title | Effect of Pump Pulsation on Particle Contamination on Wafer Surface in Wet Cleaning System | en_US |
dc.type | Article | en_US |
dc.relation.no | 5 | - |
dc.relation.volume | 41 | - |
dc.identifier.doi | 10.1149/1.3630847 | - |
dc.relation.page | 221-227 | - |
dc.contributor.googleauthor | Lim, JS | - |
dc.contributor.googleauthor | Venkatesh, RP | - |
dc.contributor.googleauthor | Park, JG | - |
dc.sector.campus | S | - |
dc.sector.daehak | GRADUATE SCHOOL[S] | - |
dc.sector.department | DEPARTMENT OF BIONANOTECHNOLOGY | - |
dc.identifier.pid | jgpark | - |
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