Mesoporous Thin-Film on Highly-Sensitive Resonant Chemical Sensor for Relative Humidity and CO2 Detection
- Title
- Mesoporous Thin-Film on Highly-Sensitive Resonant Chemical Sensor for Relative Humidity and CO2 Detection
- Author
- 박관규
- Keywords
- LARGE-PORE STRUCTURES; SILICA FILMS
- Issue Date
- 2012-02
- Publisher
- AMER CHEMICAL SOC, 1155 16TH ST, NW, WASHINGTON, DC 20036 USA
- Citation
- ANALYTICAL CHEMISTRY; APR 3 2012, 84 7, p3063-p3066, 4p.
- Abstract
- Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present a direct application of a mesoporous silica thin film on a highly sensitive miniaturized resonant chemical sensor with a mass sensitivity at the zeptogram scale for relative humidity and CO2 detection. Using mesoporous silica thin-film, we report one of the lowest volume resolutions and a sensitive detection of 5.1 x 10(-4)% RH/Hz to water vapor in N-2, which is 70 times higher than a device with a nontemplated silica layer. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 x 10(-4)%/Hz and a volume resolution of 1.82 x 10(-4)% to CO2 in N-2.
- URI
- https://pubs.acs.org/doi/abs/10.1021/ac300225c
- ISSN
- 0003-2700
- DOI
- 10.1021/ac300225c
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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