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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 31-40 of 84 (Search time: 0.003 seconds).
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Title
Author(s)
2008-11
A Mask Generation Approach to Double Patterning Technology with Inverse Lithography
안일신
2008-11
Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process
안일신
2008-04
Application of ellipsometry in immersion lithography
안일신
2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
안일신
2018-03
Comparison null imaging ellipsometry using polarization rotator
안일신
2008-08
Ellipsometry for Pellicle-Covered Surface
안일신
2008-06
Anisotropic resist reflow process simulation for 22 nm elongated contact holes
안일신
2003-09
A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry
안일신
2017-10
Development of micro-spot spectroscopic ellipsometer using reflective objectives
안일신
2006-06
Mask Haze Measurement by Spectroscopic Ellipsometry
안일신
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ellipsometry
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Ellipsometry
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Lithography
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calibration
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lithography
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Navier-Stokes equation
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32 nm line and space half-pitch
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ALIGNMENT
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bias
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BIPLATE COMPENSATOR
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2020 - 2023
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