A one-step photolithography method for fabrication of a staggered herringbone mixer using inclined UV lithography
- Title
- A one-step photolithography method for fabrication of a staggered herringbone mixer using inclined UV lithography
- Author
- 송시몬
- Issue Date
- 2011-07
- Publisher
- IOP Publishing LTD
- Citation
- Journal of Micromechanics and Microengineering, 2011, 21(7). 077001
- Abstract
- We present a facile method for fabrication of a staggered herringbone mixer using inclined UV lithography, in which the incident UV angle is not perpendicular to the wafer. With this fabrication method, we were able to fabricate staggered herringbone ridges and microchannels simultaneously. As a result, complicated photolithography processes were reduced to a single step. Herein, we describe the fabrication method and performance of the resulting mixers in detail, including the effects of ridge height on mixing. This fabrication technique can be applied directly to the fabrication of other 3D structures on microfluidic chips.
- URI
- http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=NART56541374
- ISSN
- 0960-1317
- DOI
- 10.1088/0960-1317/21/7/077001
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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