Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-02-06T08:50:49Z | - |
dc.date.available | 2018-02-06T08:50:49Z | - |
dc.date.issued | 2011-01 | - |
dc.identifier.citation | PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20(1) | en_US |
dc.identifier.issn | 0963-0252 | - |
dc.identifier.uri | http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=NART55136935 | - |
dc.description.abstract | Experimental measurements of the total energy lost per electron-ion pair lost, epsilon(T), were performed in a low-pressure inductive atomic gases (Ar, He) and molecular gases (O-2, N-2) discharge. The value of epsilon(T) was determined from a power balance based on the electropositive global (volume-averaged) model. A floating harmonic method was employed to measure ion fluxes and electron temperatures at the discharge wall. In the pressure range 5-50 mTorr, it was found that the measured epsilon(T) ranged from about 70 to 150 V for atomic gases, but from about 180 to 1300 V for molecular gases. This difference between atomic and molecular discharge is caused by additional collisional energy losses of molecular gases. For argon discharge, the stepwise ionization effect on epsilon(T) was observed at relatively high pressures. For different gases, the measured epsilon(T) was evaluated with respect to the electron temperature, and then compared with the calculation results, which were derived from collisional and kinetic energy loss. The measured epsilon(T) and their calculations showed reasonable agreement. | en_US |
dc.description.sponsorship | The authors are grateful to Professor J T Gudmundsson for providing us with a helpful data set of rate coefficients (Technical Reports). One of the authors (Y-K L) was funded by Seoul Science Scholarship Foundation of Korea. This research was partly supported by the Science and Engineering Research Center (S/ERC) program and National R&D program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (2009-0082624). | en_US |
dc.language.iso | en | en_US |
dc.publisher | IOP Publishing LTD | en_US |
dc.subject | VOLUME-AVERAGED MODEL | en_US |
dc.subject | COUPLED PLASMA SOURCE | en_US |
dc.subject | GLOBAL-MODEL | en_US |
dc.subject | GLOW-DISCHARGE | en_US |
dc.subject | RF PLASMA | en_US |
dc.subject | PARAMETERS | en_US |
dc.subject | DENSITY | en_US |
dc.subject | DEPOSITION | en_US |
dc.subject | KINETICS | en_US |
dc.subject | GROWTH | en_US |
dc.title | Measurements of the total energy lost per electron-ion pair lost in low-pressure inductive argon, helium, oxygen and nitrogen discharge | en_US |
dc.type | Article | en_US |
dc.relation.no | 1 | - |
dc.relation.volume | 20 | - |
dc.relation.page | 1-1 | - |
dc.relation.journal | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.contributor.googleauthor | Lee, Young-Kwang | - |
dc.contributor.googleauthor | Ku, Ju-Hwan | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2011211276 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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