Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 최창환 | - |
dc.date.accessioned | 2018-02-03T06:22:08Z | - |
dc.date.available | 2018-02-03T06:22:08Z | - |
dc.date.issued | 2011-03 | - |
dc.identifier.citation | Applied Physics Letters, 2011, 98(12), 123506 | en_US |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | https://aip.scitation.org/doi/10.1063/1.3570655 | - |
dc.description.abstract | The impact of diffusionless anneal using dynamic surface anneal (DSA) on the electrical properties of p-type metal-oxide-semiconductor devices with high-k gate dielectrics and metal gate was investigated by monitoring flatband voltage (V(FB)) and equivalent oxide thickness (EOT) change. Compared to rapid thermal anneal, DSA induces a positive V(FB) shift without EOT degradation. This finding is attributed to suppression of positively charged oxygen vacancies [V(o)(++)] generation in high-k dielectrics due to the shorter thermal budget. Processing parameters including high-k dielectrics, TiN metal gate thickness, and Si cap deposition temperature significantly affect thermally induced-oxygen vacancies, leading to different V(FB) behaviors. (c) 2011 American Institute of Physics. [doi:10.1063/1.3570655] | en_US |
dc.language.iso | en | en_US |
dc.publisher | Amer INST Physics | en_US |
dc.title | Impact of diffusionless anneal using dynamic surface anneal on the electrical properties of a high-k/metal gate stack in metal-oxide-semiconductor devices | en_US |
dc.type | Article | en_US |
dc.relation.no | 12 | - |
dc.relation.volume | 98 | - |
dc.identifier.doi | 10.1063/1.3570655 | - |
dc.relation.page | - | - |
dc.relation.journal | APPLIED PHYSICS LETTERS | - |
dc.contributor.googleauthor | Choi, C | - |
dc.contributor.googleauthor | Lee, KL | - |
dc.contributor.googleauthor | Narayanan, V | - |
dc.relation.code | 2011200866 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | cchoi | - |
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