Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2017-10-16T04:46:19Z | - |
dc.date.available | 2017-10-16T04:46:19Z | - |
dc.date.issued | 2015-12 | - |
dc.identifier.citation | PHYSICS OF PLASMAS, v. 22, NO 12, Article number 123504, Page. 1-6 | en_US |
dc.identifier.issn | 1070-664X | - |
dc.identifier.issn | 1089-7674 | - |
dc.identifier.uri | http://aip.scitation.org/doi/10.1063/1.4936951 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/30036 | - |
dc.description.abstract | In a plasma discharge system, the power loss at powered line, matching network, and other transmission line can affect the discharge characteristics such as the power transfer efficiency, voltage and current at powered electrode, and plasma density. In this paper, we propose a method to reduce power loss by using a step down transformer mounted between the matching network and the powered electrode in a capacitively coupled argon plasma. This step down transformer decreases the power loss by reducing the current flowing through the matching network and transmission line. As a result, the power transfer efficiency was increased about 5%-10% by using a step down transformer. However, the plasma density was dramatically increased compared to no transformer. This can be understood by the increase in ohmic heating and the decrease in dc-self bias. By simply mounting a transformer, improvement of discharge efficiency can be achieved in capacitively coupled plasmas. (C) 2015 AIP Publishing LLC. | en_US |
dc.description.sponsorship | This work was supported by the Converging Research Center Program (NRF-2014M3C1A8053701) and National R&D Program (NRF-2014M1A7A1A03045185) of the National Research Foundation of Korea funded by the Ministry of Education, Science, and Technology. | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | ELECTRON-ENERGY-DISTRIBUTION | en_US |
dc.subject | MODE TRANSITION | en_US |
dc.subject | LARGE-AREA | en_US |
dc.subject | MAGNETIC-FIELD | en_US |
dc.subject | RF DISCHARGES | en_US |
dc.subject | 13.56 MHZ | en_US |
dc.subject | FREQUENCY | en_US |
dc.subject | EFFICIENCY | en_US |
dc.subject | ANTENNA | en_US |
dc.subject | ARGON | en_US |
dc.title | A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma | en_US |
dc.type | Article | en_US |
dc.relation.no | 12 | - |
dc.relation.volume | 22 | - |
dc.identifier.doi | 10.1063/1.4936951 | - |
dc.relation.page | 1-6 | - |
dc.relation.journal | PHYSICS OF PLASMAS | - |
dc.contributor.googleauthor | Kim, Young-Cheol | - |
dc.contributor.googleauthor | Kim, Hyun-Jun | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2015001483 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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