Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 신동수 | - |
dc.date.accessioned | 2023-06-01T01:33:39Z | - |
dc.date.available | 2023-06-01T01:33:39Z | - |
dc.date.issued | 2011-03 | - |
dc.identifier.citation | Proceedings of SPIE - The International Society for Optical Engineering, v. 7939, article no. 79392B, Page. 1-9 | - |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7939/1/Measurement-of-nonuniform-bowing-in-GaN-sapphire-epi-wafers-and/10.1117/12.874127.short | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/181906 | - |
dc.description.abstract | We present our approach to measure the profile of nonuniformly bent GaN epi-wafers grown on sapphire substrates. By using a laser displacement sensor, the position of the epi-wafer is accurately measured and mapped. From the measured profile data, analysis of stress distributions over the nonuniformly bent wafer is performed by using a theoretical model. We show the result of theoretical analysis of how the stress tensors distribute over a wafer. The estimated stress tensors are related with optical properties such as photoluminescence of the wafer. © 2011 SPIE. | - |
dc.language | en | - |
dc.publisher | SPIE | - |
dc.subject | GaN | - |
dc.subject | nonuniform bow | - |
dc.subject | time-resolved photoluminescence | - |
dc.subject | wafer stress | - |
dc.title | Measurement of nonuniform bowing in GaN/sapphire epi-wafers and subsequent stress analysis by using a theoretical model | - |
dc.type | Article | - |
dc.relation.volume | 7939 | - |
dc.identifier.doi | 10.1117/12.874127 | - |
dc.relation.page | 1-9 | - |
dc.relation.journal | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.contributor.googleauthor | Jang, Yuseong | - |
dc.contributor.googleauthor | Jang, Dong-Hyun | - |
dc.contributor.googleauthor | Shim, Jong-In | - |
dc.contributor.googleauthor | Shin, Dong Soo | - |
dc.sector.campus | E | - |
dc.sector.daehak | 과학기술융합대학 | - |
dc.sector.department | 나노광전자학과 | - |
dc.identifier.pid | dshin | - |
dc.identifier.article | 79392B | - |
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