Synthesis and electrical properties of (Bi1/2Na1/2)TiO3 (BNT) ferroelectric thin films by liquid sprayed mist chemical vapor deposition technique
- Title
- Synthesis and electrical properties of (Bi1/2Na1/2)TiO3 (BNT) ferroelectric thin films by liquid sprayed mist chemical vapor deposition technique
- Author
- 좌용호
- Keywords
- lead-free ferroelectric materials; liquid sprayed misted chemical vapor deposition method; electrical property; crystalline orientation
- Issue Date
- 2006-11
- Publisher
- American Scientific Publishers
- Citation
- Journal of Nanoscience and Nanotechnology, v. 6, NO. 11, Page. 3479-3482
- Abstract
- This study aims to synthesize lead-free ferroelectric material, (Bi1/2Na1/2)TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400-600 degrees C and 30-90 min. (Bi1/2Na1/2)TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35-162 nm. The remnant polarization (2P(r)) and the dielectric constant were 4.6-16.8 mu C/cm(2), 325-350, respectively.
- URI
- https://www.ingentaconnect.com/content/asp/jnn/2006/00000006/00000011/art00039https://repository.hanyang.ac.kr/handle/20.500.11754/181478
- ISSN
- 1533-4880;1533-4899
- DOI
- 10.1166/jnn.2006.038
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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