Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이정호 | - |
dc.date.accessioned | 2023-05-25T01:02:07Z | - |
dc.date.available | 2023-05-25T01:02:07Z | - |
dc.date.issued | 2013-04 | - |
dc.identifier.citation | Electrochimica Acta, v. 94, Page. 57-61 | - |
dc.identifier.issn | 0013-4686;1873-3859 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0013468613001837?via%3Dihub | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/181368 | - |
dc.description.abstract | We present a new route for the fabrication of mesoporous silicon using Pt nanoparticle-assisted chemical etching. In contrast to stain etching, the mesoporous silicon films show good uniformity. The porosity and thickness can be tuned well via adjusting the HF and H2O2 concentration. Etching rates of more than 1.7 mu m/min have been obtained under optimized conditions. The charge transfer through the Pt Si nano-Schottky contact was simulated to qualitatively explain the observed phenomenon. Our approach will allow a much simpler and cheaper route to fabricate mesoporous silicon layers compared to electrochemical etching as used in the area of surface micromachining and layer transfer techniques. (C) 2013 Elsevier Ltd. All rights reserved. | - |
dc.description.sponsorship | X. Li acknowledges the financial support from International Max-Planck Research School (IMPRS). Y. Xiao is grateful for the support from the China Scholarship Council (CSC). We thank Prof. Michael Bron for his kind help in electrochemical measurements. | - |
dc.language | en | - |
dc.publisher | Pergamon Press Ltd. | - |
dc.subject | Metal assisted chemical etching | - |
dc.subject | Pt nanoparticle | - |
dc.subject | Mesoporous Si | - |
dc.title | Fast electroless fabrication of uniform mesoporous silicon layers | - |
dc.type | Article | - |
dc.relation.volume | 94 | - |
dc.identifier.doi | 10.1016/j.electacta.2013.01.136 | - |
dc.relation.page | 57-61 | - |
dc.relation.journal | Electrochimica Acta | - |
dc.contributor.googleauthor | Piekielska, Katarzyna | - |
dc.contributor.googleauthor | Sprafke, Alexander | - |
dc.contributor.googleauthor | Lee, Jung-Ho | - |
dc.contributor.googleauthor | Wehrspohn, Ralf B. | - |
dc.contributor.googleauthor | Li, Xiaopeng | - |
dc.contributor.googleauthor | Xiao, Yanjun | - |
dc.contributor.googleauthor | Yan, Chenglin | - |
dc.contributor.googleauthor | Song, Jae-Won | - |
dc.contributor.googleauthor | Talalaev, Vadim | - |
dc.contributor.googleauthor | Schweizer, Stefan L. | - |
dc.sector.campus | E | - |
dc.sector.daehak | 공학대학 | - |
dc.sector.department | 재료화학공학과 | - |
dc.identifier.pid | jungho | - |
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