Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2023-05-24T02:33:59Z | - |
dc.date.available | 2023-05-24T02:33:59Z | - |
dc.date.issued | 2005-09 | - |
dc.identifier.citation | 한국재료학회지, v. 15, NO. 9, Page. 589-593 | - |
dc.identifier.issn | 1225-0562;2287-7258 | - |
dc.identifier.uri | http://db.koreascholar.com/Article?code=296505 | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/181311 | - |
dc.description.abstract | Nanoimprinting lithography (NIL) is known as a suitable technique for fabricating nano and micro structures of high definition. Hot embossing is one of NIL techniques and can imprint on thin films and bulk polymers. Key issues of hot embossing are time and expense needed to produce a stamp withstanding a high temperature and pressure. Fabrication of a metal stamp such as an electroplated nickel is cost intensive and time consuming. A ceramic stamp made by silicon is easy to break when the pressure is applied. In this paper, a plastic stamp using a high temperature epoxy was fabricated and tested. The plastic stamp was relative inexpensive, rapid to produce and durable enough to withstanding multiple hot embossing cycles. The merits of low viscosity epoxy solutions were a fast degassing and a rapid filling the microstructures. The hot embossing process with plastic stamp was performed on PMMA substrates. The hot embossing was conducted at 12.6 bar, 120 oC and 10 minutes. An imprinted PMMA wafer was almost same value of the plastic stamp after 10 times embossing. Entire fabrication process from silicon master to plastic stamp was completed within 12 hours. | - |
dc.description.sponsorship | 본 연구는 과학기술부 21세기 프론티어 연구개발사엽인 나노메차트로닉스 기술개발사엽 (과제번호: 05K1401-00215)의 연구비 지원을 받아 수행되었으며, 이에 관계자 여러분께 감사드립니다. | - |
dc.language | ko | - |
dc.publisher | 한국재료학회 | - |
dc.subject | Nanoimprinting | - |
dc.subject | Hot Embossing | - |
dc.subject | Plastic mold | - |
dc.subject | High temperature epoxy | - |
dc.title | 마이크로 구조물 형성을 위한 핫 엠보싱용 플라스틱 스탬프 제작 | - |
dc.title.alternative | Fabrication of hot embossing plastic stamps for microstructures | - |
dc.type | Article | - |
dc.relation.no | 9 | - |
dc.relation.volume | 15 | - |
dc.identifier.doi | 10.3740/MRSK.2005.15.9.589 | - |
dc.relation.page | 589-593 | - |
dc.relation.journal | 한국재료학회지 | - |
dc.contributor.googleauthor | 차남구 | - |
dc.contributor.googleauthor | 박창화 | - |
dc.contributor.googleauthor | 임현우 | - |
dc.contributor.googleauthor | 박진구 | - |
dc.contributor.googleauthor | 정준호 | - |
dc.contributor.googleauthor | 이응숙 | - |
dc.sector.campus | E | - |
dc.sector.daehak | 공학대학 | - |
dc.sector.department | 재료화학공학과 | - |
dc.identifier.pid | jgpark | - |
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