Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2023-05-24T02:12:06Z | - |
dc.date.available | 2023-05-24T02:12:06Z | - |
dc.date.issued | 2007-10 | - |
dc.identifier.citation | ECS Transactions, v. 11, NO. 2, Page. 361-367 | - |
dc.identifier.issn | 1938-5862;1938-6737 | - |
dc.identifier.uri | https://iopscience.iop.org/article/10.1149/1.2779399 | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/181275 | - |
dc.description.abstract | The effect of wet/dry deposition methods and wet/dry cleaning methods on particle removal efficiency (PRE) was investigated. PRE strongly is strongly dependent on particle deposition and removal methods. IPA deposition method was easier to remove silica and PSL particles than DI deposition method when a dry cleaning, a laser shock wave cleaning was applied. DI water deposited PSL particles on both oxide and silicon nitride wafers are much easier to remove than IPA deposited particles in wet cleaning by DI water. However, PRE of silica particles did not show dependency on deposition methods. © The Electrochemical Society. | - |
dc.description.sponsorship | This work is supported by the Medium-term Strategic Technology Development Program, the EUV R&D Program, the Korea Institute of Industrial Technology Evaluation and Planning, the Research and Development program of Ministry of Commerce, Industry and Energy (MOCIE), the fostering project of the Lab of Excellency, and post BK21 program. | - |
dc.language | en | - |
dc.publisher | Electrochemical Society, Inc. | - |
dc.title | Effect of particle deposition and wet/dry cleaning methods on particle removal efficiency | - |
dc.type | Article | - |
dc.relation.no | 2 | - |
dc.relation.volume | 11 | - |
dc.identifier.doi | 10.1149/1.2779399 | - |
dc.relation.page | 361-367 | - |
dc.relation.journal | ECS Transactions | - |
dc.contributor.googleauthor | Kim, Tae Gon | - |
dc.contributor.googleauthor | Hu, Shan | - |
dc.contributor.googleauthor | Busnaina, Ahmed.A. | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.sector.campus | E | - |
dc.sector.daehak | 공학대학 | - |
dc.sector.department | 재료화학공학과 | - |
dc.identifier.pid | jgpark | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.