Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 유봉영 | - |
dc.date.accessioned | 2023-05-19T05:48:53Z | - |
dc.date.available | 2023-05-19T05:48:53Z | - |
dc.date.issued | 2021-10 | - |
dc.identifier.citation | 2021 7th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2021, Page. 31-31 | - |
dc.identifier.uri | https://ieeexplore.ieee.org/document/9598451 | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/180927 | - |
dc.description.abstract | Extensive electrochemical analysis for Indium chloride electrolyte have been executed to make it applicable for fine pitch micro bump application. Indium micro bumps with under bump materials such as Copper, Nickel and Cobalt were fabricated in 20 µm pitch through-resist pattern. There was no defect at the interface between In and UBMs after deposition. The formation kinetics of intermetallic compounds and the interface reaction have also been investigated. © 2021 IEEE | - |
dc.language | en | - |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
dc.title | Electrodeposition of indium for low temperature 3D stacking | - |
dc.type | Article | - |
dc.identifier.doi | 10.1109/LTB-3D53950.2021.9598451 | - |
dc.relation.page | 31-31 | - |
dc.relation.journal | 2021 7th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2021 | - |
dc.contributor.googleauthor | Inoue, Fumihiro | - |
dc.contributor.googleauthor | Park, Kimoon | - |
dc.contributor.googleauthor | Derakhshandeh, Jaber | - |
dc.contributor.googleauthor | Yoo, Bongyoung | - |
dc.sector.campus | E | - |
dc.sector.daehak | 공학대학 | - |
dc.sector.department | 재료화학공학과 | - |
dc.identifier.pid | byyoo | - |
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