Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 임원빈 | - |
dc.date.accessioned | 2022-12-13T04:44:37Z | - |
dc.date.available | 2022-12-13T04:44:37Z | - |
dc.date.issued | 2021-06 | - |
dc.identifier.citation | 반도체디스플레이기술학회지, v. 20, NO. 2, Page. 61-66 | en_US |
dc.identifier.issn | 1738-2270 | en_US |
dc.identifier.uri | https://koreascience.kr/article/JAKO202121137925800.view?orgId=tkcs&lang=ko | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/178260 | - |
dc.description.abstract | In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al2O3-SiO2(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF4/O2/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al2O3 and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO2. | en_US |
dc.description.sponsorship | 이 논문은 중소벤처기업부가 후원하는 월드클래스300 프로젝트 연구 개발(R&D) 지원사업[프로젝트 번호: S2520985]과 한국연구재단(NRF)[NRF-2020M3H4A3106001]으로부터 지원을 받아 연구되었습니다. | en_US |
dc.language | en | en_US |
dc.publisher | 한국반도체디스플레이기술학회 | en_US |
dc.subject | Plasma resistance | en_US |
dc.subject | Plasma etching | en_US |
dc.subject | Alkaline-earth glass | en_US |
dc.subject | DOE(Design Of Experiments) | en_US |
dc.title | MgO-Al2O3-SiO2계 유리의 열물성과 내플라즈마성 연구 | en_US |
dc.title.alternative | Study on thermal properties and plasma resistance of MgO-Al2O3-SiO2 glass | en_US |
dc.type | Article | en_US |
dc.relation.no | 2 | - |
dc.relation.volume | 20 | - |
dc.relation.page | 61-66 | - |
dc.relation.journal | 반도체디스플레이기술학회지 | - |
dc.contributor.googleauthor | 김형준 | - |
dc.contributor.googleauthor | 윤지섭 | - |
dc.contributor.googleauthor | 최재호 | - |
dc.contributor.googleauthor | 정윤성 | - |
dc.contributor.googleauthor | 민경원 | - |
dc.contributor.googleauthor | 임원빈 | - |
dc.sector.campus | S | - |
dc.sector.daehak | 공과대학 | - |
dc.sector.department | 신소재공학부 | - |
dc.identifier.pid | imwonbin | - |
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