Machining characteristics of glass substrates containing chemical components in femtosecond laser helical drilling
- Title
- Machining characteristics of glass substrates containing chemical components in femtosecond laser helical drilling
- Author
- 문승재
- Keywords
- Femtosecond laser; Helical drilling; Glass; Glass chemicals
- Issue Date
- 2021-03
- Publisher
- KOREAN SOC PRECISION ENG
- Citation
- INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, v. 8, NO. 2, Page. 375-385
- Abstract
- The machining characteristics of glass substrates containing chemical components were investigated for the purpose of femtosecond laser helical drilling. A femtosecond laser of wavelength 1552 nm and pulse duration 800 fs was adopted in the laser machining system. The substrates investigated were aluminosilicate, soda-lime, and borosilicate glass. The chemical components contained in each glass substrate were quantitatively analyzed by laser ablation-induced chemical plasma mass spectrometry. The characteristics of the drilling conditions for each glass substrate were affected by its chemical components. As the wt% of Al(2)O(3)and MgO components in the glass substrates increased, the ablation threshold energy of each substrate decreased, resulting in greater vertical speed of the laser head.
- URI
- https://link.springer.com/article/10.1007/s40684-020-00242-2https://repository.hanyang.ac.kr/handle/20.500.11754/177414
- ISSN
- 2288-6206;2198-0810
- DOI
- 10.1007/s40684-020-00242-2
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML