Effect of Dissolved Oxygen on Removal of Benzotriazole from Co during a Post-Co CMP Cleaning
- Title
- Effect of Dissolved Oxygen on Removal of Benzotriazole from Co during a Post-Co CMP Cleaning
- Author
- 박진구
- Keywords
- cobalt; benzotriazole; adsorption; dissolved oxygen; post Co-CMP cleaning
- Issue Date
- 2021-02
- Publisher
- Scientific.net
- Citation
- Solid State Phenomena, v. 314, Page. 270-274
- Abstract
- A systematic study of the adsorption of benzotriazole on Co surface and its removal in
aqueous solutions was carried out for post-CMP cleaning application. Static etch rate (SER)
measurements and electrochemical impedance spectroscopy (EIS) were employed. The experimental
results show that BTA adsorbed well on Co surface when it exposed to BTA solution at neutral and
alkaline pH. BTA did not adsorb due to active Co dissolution at acidic pH. The effect of dissolved
oxygen (DO) concentration in de-ionized (DI) water on the removal of Co-BTA complex layer was
investigated. At the DI water rinse process after BTA treatment, Co-BTA layer was maintained on
Co surface when DO concentration of DI water was low. Interestingly, BTA was removed by DI
water with high DO concentration.
- URI
- https://www.scientific.net/SSP.314.270https://repository.hanyang.ac.kr/handle/20.500.11754/171890
- ISSN
- 1662-9779
- DOI
- 10.4028/www.scientific.net/SSP.314.270
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML