Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진성 | - |
dc.date.accessioned | 2022-05-02T06:55:55Z | - |
dc.date.available | 2022-05-02T06:55:55Z | - |
dc.date.issued | 2020-09 | - |
dc.identifier.citation | APPLIED SURFACE SCIENCE, v. 525, article no. 146383 | en_US |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.issn | 1873-5584 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0169433220311405?via%3Dihub | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/170483 | - |
dc.description.abstract | Indicone films consisting of indium and organic aromatic linker are grown by molecular layer deposition (MLD) using diethyl[1,1,1-trimethyl-N-(trimethylsilyl)-silanaminato]-indium (INCA-1) as the indium precursor and hydroquinone (HQ) as the organic precursor. A constant growth rate typical for MLD is exhibited at temperature between 100 and 250 degrees C. The structure and the properties of the deposited thin films are analyzed using various experimental and theoretical techniques such as Fourier transform infrared (FTIR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and density functional theory (DFT) calculations. Indicone films show time-dependent change upon exposure to ambient air, which is explained by adsorption of H2O. Furthermore, transparent and conducting organic-inorganic hybrid thin films are grown by applying supercycles of atomic layer deposition (ALD) of indium oxide and MLD of indicone. Structural, optical and electrical properties of the hybrid thin films can be adjusted according to the supercycle ratio. Especially, the hybrid film with 99:1 cycle ratio of indium oxide:indicone shows minimal change of electrical resistivity even after repeated bending over 100,000 cycles. Currently developed indicone-based hybrid thin films may have applications for flexible transparent conducting material. | en_US |
dc.description.sponsorship | This research was by the MOTIE (Ministry of Trade, Industry & Energy; project number 10080633) and KSRC (Korea Semiconductor Research Consortium) support program for the development of the future semiconductor device. This work was also supported by the National Supercomputing Center with supercomputing resources including technical support (KSC-2018-CHA-0037). This work was also supported by 2019 Hongik University Research Fund. | en_US |
dc.language.iso | en | en_US |
dc.publisher | ELSEVIER | en_US |
dc.subject | Atomic layer deposition | en_US |
dc.subject | Hybrid material | en_US |
dc.subject | Indium oxide | en_US |
dc.subject | Flexible electronic device | en_US |
dc.subject | Transparent conducting oxide | en_US |
dc.title | Molecular layer deposition of indicone and organic-inorganic hybrid thin films as flexible transparent conductor | en_US |
dc.type | Article | en_US |
dc.relation.volume | 525 | - |
dc.identifier.doi | 10.1016/j.apsusc.2020.146383 | - |
dc.relation.page | 1-2 | - |
dc.relation.journal | APPLIED SURFACE SCIENCE | - |
dc.contributor.googleauthor | Lee, Seunghwan | - |
dc.contributor.googleauthor | Baek, GeonHo | - |
dc.contributor.googleauthor | Lee, Jung-Hoon | - |
dc.contributor.googleauthor | Van, Tran Thi Ngoc | - |
dc.contributor.googleauthor | Ansari, Abu Saad | - |
dc.contributor.googleauthor | Shong, Bonggeun | - |
dc.contributor.googleauthor | Park, Jin-Seong | - |
dc.relation.code | 2020054238 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | SCHOOL OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | jsparklime | - |
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