Measurement of five-degrees-of-freedom spindle error motion using multi probe error separation

Abstract

Herein, a precision measurement method is proposed to evaluate the radial, axial, and tilt error motions of rotating devices such as precision spindles. To improve the accuracy of the estimated multiple-degree-of-freedom error motion components, form error signals in the runout signals are separated and precompensated for before the calculation of the five-degrees-of-freedom error motion components. Fourier model-based multi probe error separation (MPES) techniques, which can prevent the occurrence of harmonic distortions, are applied to separate the form error signals. A three-probe method is applied to layers on the side surface of the cylindrical artifact, and a modified two-probe method is developed and applied to the upper surface. The radial, tilt, and axial error motions are calculated using the runout signals that do not contain the separated form error signals. The measurement system uses eight capacitive probes to detect the runout signals of the cylindrical artifact mounted at the center of the rotating device. To compare the proposed method with the five-probe-based conventional measuring method, an evaluation test simulation is conducted repeatedly five times. Results indicate that the proposed MPES method calculated the uncertainty using the deviation between the computed results from the existing and novel methods