Repository at Hanyang UniversityCOLLEGE OF ENGINEERING[S](공과대학)MATERIALS SCIENCE AND ENGINEERING(신소재공학부)Articles
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dc.contributor.author전형탁-
dc.date.accessioned2021-11-22T06:50:25Z-
dc.date.available2021-11-22T06:50:25Z-
dc.date.issued2020-05-
dc.identifier.citationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v. 38, no. 3, article no. 037001en_US
dc.identifier.issn0734-2101-
dc.identifier.issn1520-8559-
dc.identifier.urihttps://avs.scitation.org/doi/10.1116/6.0000143-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/166399-
dc.description.abstractCorrectionen_US
dc.language.isoenen_US
dc.publisherA V S AMER INST PHYSICSen_US
dc.titleHistory of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013)en_US
dc.typeArticleen_US
dc.relation.no3-
dc.relation.volume38-
dc.identifier.doi10.1116/6.0000143-
dc.relation.page37001-37001-
dc.relation.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-
dc.contributor.googleauthorParsons, Gregory N.-
dc.contributor.googleauthorElam, Jeffrey W.-
dc.contributor.googleauthorGeorge, Steven M.-
dc.contributor.googleauthorHaukka, Suvi-
dc.contributor.googleauthorJeon, Hyeongtag-
dc.contributor.googleauthorKessels, W. M. M.-
dc.contributor.googleauthorLeskelae, Markku-
dc.contributor.googleauthorPoodt, Paul-
dc.contributor.googleauthorRitala, Mikko-
dc.contributor.googleauthorRossnagel, Steven M.-
dc.relation.code2020048759-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentSCHOOL OF MATERIALS SCIENCE AND ENGINEERING-
dc.identifier.pidhjeon-
dc.identifier.orcidhttps://orcid.org/0000-0003-2502-7413-
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