Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2021-11-22T06:50:25Z | - |
dc.date.available | 2021-11-22T06:50:25Z | - |
dc.date.issued | 2020-05 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v. 38, no. 3, article no. 037001 | en_US |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.issn | 1520-8559 | - |
dc.identifier.uri | https://avs.scitation.org/doi/10.1116/6.0000143 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/166399 | - |
dc.description.abstract | Correction | en_US |
dc.language.iso | en | en_US |
dc.publisher | A V S AMER INST PHYSICS | en_US |
dc.title | History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013) | en_US |
dc.type | Article | en_US |
dc.relation.no | 3 | - |
dc.relation.volume | 38 | - |
dc.identifier.doi | 10.1116/6.0000143 | - |
dc.relation.page | 37001-37001 | - |
dc.relation.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.contributor.googleauthor | Parsons, Gregory N. | - |
dc.contributor.googleauthor | Elam, Jeffrey W. | - |
dc.contributor.googleauthor | George, Steven M. | - |
dc.contributor.googleauthor | Haukka, Suvi | - |
dc.contributor.googleauthor | Jeon, Hyeongtag | - |
dc.contributor.googleauthor | Kessels, W. M. M. | - |
dc.contributor.googleauthor | Leskelae, Markku | - |
dc.contributor.googleauthor | Poodt, Paul | - |
dc.contributor.googleauthor | Ritala, Mikko | - |
dc.contributor.googleauthor | Rossnagel, Steven M. | - |
dc.relation.code | 2020048759 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | SCHOOL OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | hjeon | - |
dc.identifier.orcid | https://orcid.org/0000-0003-2502-7413 | - |
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