Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)ELECTRICAL ENGINEERING(전자공학부)Articles
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dc.contributor.author박진석-
dc.date.accessioned2021-07-22T04:31:18Z-
dc.date.available2021-07-22T04:31:18Z-
dc.date.issued2000-07-
dc.identifier.citation대한전기학회 학술대회 논문집, page. 1717-1719en_US
dc.identifier.urihttps://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01347046-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/162979-
dc.description.abstract기존의 FCVA에 system의 음극부에 거울형 자계구조를 적용하여 arc 방전의 개시 및 연속성을 향상시킨 새로운 FCVA system을 제작하고 이를 이용하여 DLC 박막을 증착하고 그 구조적, 전기적 물성을 분석하였다.en_US
dc.language.isoko_KRen_US
dc.publisher대한전기학회en_US
dc.title거울형 자계구조를 갖는 진공여과아크 증착법을 이용한 다이아몬드상 탄소 박막의 증착 및 물성 분석en_US
dc.title.alternativeDeposition of DLC film by using an FCVA system with a magnetic mirror and characterization of its material propertiesen_US
dc.typeArticleen_US
dc.relation.journal전기학회논문지(A,B,C,D)-
dc.contributor.googleauthor박창균-
dc.contributor.googleauthor엄현석-
dc.contributor.googleauthor서수형-
dc.contributor.googleauthor박진석-
dc.relation.code2012101073-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF ENGINEERING SCIENCES[E]-
dc.sector.departmentDIVISION OF ELECTRICAL ENGINEERING-
dc.identifier.pidjinsp-
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